SMEE introduces a new generation of lithography machines in China

Shanghai Microelectronics Equipment (SMEE) has officially unveiled a new generation of dry lithography systems at the 9th China International Import Expo.

This new development marks another major milestone in China's ongoing semiconductor equipment localization program. The platform is built on a proprietary standardized architecture and supports both I-line and KrF manufacturing processes.

• SMEE showcased its new generation dry lithography platform.
• Support for advanced I-line and KrF technological processes.
• Over 10 million silicon wafers processed with 92%+ operational efficiency.
• Equipment is already actively deployed in domestic Chinese chip factories.

Technical features of the new lithography platform

The manufacturer claims full proprietary control over the design and supply chain of key hardware components. This comprehensive list includes high-precision optical systems, mask and wafer positioning mechanisms, and automated material handling complexes.

The company states that the overall quality matches leading foreign alternatives on the market. Layer alignment accuracy and equipment throughput are approaching international standards, ensuring reliable and stable operation across continuous production lines.

Production metrics and industrial implementation

According to the manufacturer, the cumulative volume of silicon wafers processed using these systems has already surpassed 10 million units. Furthermore, the effective operational productivity of the equipment remains consistently above 92 percent.

The systems demonstrate stable performance across diverse technological processes and are built for long-term manufacturing deployment. SMEE reports that its machinery is already operating successfully at Chinese enterprises producing memory and logic microchips.

Strategic significance for the domestic market

Founded in 2002, SMEE remains the sole domestic manufacturer in China capable of mass-producing and supplying dry lithography equipment. Advancing these local capabilities helps mitigate supply chain risks amid evolving global semiconductor restrictions.